Method of testing individual dies on semiconductor wafers prior to singulation

摘要

A method of processing and testing a semiconductor wafer containing an array of integrated circuit dies comprises: a) providing die test cycling circuitry on the wafer b) etching contact openings through a passivation layer atop the wafer to Vcc and Vss pads associated with individual dies; c) patterning a layer of conductive material atop the water to provide a Vcc bus and a Vss bus which interconnect with the Vcc and Vss pads respectively, the Vcc bus electrically connecting with the test cycling circuitry; d) burn-in testing the wafer with selected voltages being applied to the Vss and Vcc buses e) etching the Vcc bus and Vss bus from the wafer; f) etching contact openings through the passivation layer to conductive pads on individual dies; g) testing the individual dies for operability by engaging the conductive pads with testing equipment; h) identifying operable dies; i) singulating the dies; and j) collecting the operable dies.