| 摘要 |
<p>PURPOSE:To make the polishing characteristic of the suction face equal to that of the upper face of a support member so as to heighten the flatness at the time of polishing the upper face of a vacuum suction device by forming the upper face of the support member of porous ceramics of 0.2 or less in the ratio of average pore diameter to a suction member and/or 10mum or less in the average pore diameter. CONSTITUTION:A suction member formed of porous ceramics is jointed to a support member to form a vacuum suction device. In this case, the upper face 22 of the support member 20 is also formed of porous ceramics. As to this porous ceramics, the ratio of average pore diameter to the suction member 10 is to be 0.2 or less, and/or the average pore diameter is to be 10mum or less. The polishing characteristic of the suction face 11 thereby becomes equal to that of the upper face 22 of the support member 20, so that extremely high flatness can be obtained at the time of polishing the upper face of the vacuum suction device, and air leak at the time of vacuum suction can be reduced.</p> |
