METHOD FOR FORMING FILM OF OXIDE THIN FILM,申请号JP19920071630-传众专利搜索

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发明名称	METHOD FOR FORMING FILM OF OXIDE THIN FILM
摘要
申请公布号	JPH069246(A)	申请公布日期	1994.01.18
申请号	JP19920071630	申请日期	1992.03.27
申请人	NIKON CORP;CENTRAL GLASS CO LTD	发明人	YAMADA MASAYUKI;ISHIKAWA AKIRA;SAITO TADAHIKO;NAKASE KIYOSHI;TAO MASATO;INABA HIROSHI
分类号	C03C17/245;C23C14/22;C23C14/24;C23C14/34;(IPC1-7):C03C17/245	主分类号	C03C17/245
代理机构		代理人
主权项
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