Modular bubbler container automatic refill system

摘要

A modular automatic refill system using a plurality of individual microprocessor controlled modules to control a plurality of liquid chemical temperature controllers is provided wherein replenishing liquid chemical is automatically supplied from a chemical bulk supply unit to a plurality of bubbler ampules in the corresponding liquid chemical temperature controllers based on sensed level depths in a manner that avoids contamination of the replenishing chemical and permits separate and independent operation of the individual microprocessor controlled modules.