| 摘要 |
PURPOSE:To provide a high-precision grinding device and its grinding and cutting method which have high flatness of a cut area and are capable of reducing a deformation of a processing distortion. CONSTITUTION:Synchronously with reciprocation of an X table 1 in the direction of X, a Y table (rotary table) 3 provided through a tilting table 2 is turned by 180 deg.. A work 4 mounted on a rotary table 3 is cut off by a grindstone 7 which is joined to a Z table and grindstone shaft 6 which is lowering similarly in a Z direction synchronously with a movement of the X table 1 by grinding alternately both sides of a cutting groove by only an arbitrary one face of the grindstone 7 so that only the arbitrary one face of the grindstone 7 contributes always to cutting. At the time of the cutting, a fixed tilting angle theta(normally within 1 deg.) is set up within a YZ face. With this construction, cutting resistance to be applied to both the sides of the cutting groove can be balanced and a processing distortion can be made uniform. This device is suitable for cutting of a material which is thin and has high hardness and a thin film magnetic head, which has high reliability and is for high density record reclaiming, can be realized. |
