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发明名称
HERSTELLUNG EINES HALBLEITERGRUNDMATERIALS.
摘要
申请公布号
AT99076(T)
申请公布日期
1994.01.15
申请号
AT19880905202T
申请日期
1988.06.14
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
BIRKLE, SIEGFRIED;KAMMERMAIER, JOHANN;SCHULTE, ROLF;WINNACKER, ALBRECHT;RITTMAYER, GERHARD
分类号
C23C16/26;H01L21/365;H01L29/16;(IPC1-7):H01L29/16
主分类号
C23C16/26
代理机构
代理人
主权项
地址
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