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发明名称
Sub-Micron Device Fabrication Using Multiple Aperture Filter
摘要
申请公布号
CA2094519(A1)
申请公布日期
1994.01.15
申请号
CA19932094519
申请日期
1993.06.22
申请人
AMERICAN TELEPHONE AND TELEGRAPH COMPANY
发明人
BERGER, STEVEN D.;LIDDLE, JAMES A.
分类号
H01L21/027;H01J37/317;(IPC1-7):C07C211/38;C07C211/62
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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