| 摘要 |
PURPOSE:To obtain a negative photosensitive compsn. with which a high- sensitive and high-resolution pattern profile is obtd. CONSTITUTION:This negative photosensitive compsn. contains an alkali-soluble resin, crosslinking agent for the alkali-soluble resin which acts in an acid condition, and photo-acid initiator. The photo-acid initiator is a halogen compd. expressed by (CH2)n(OCH2CHXCH2X)2. In formula, X is Cl, Br or I and n is an integer 1-4. |
