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发明名称
SEMICONDUCTOR DEVICE AND ITS PRODUCTION
摘要
申请公布号
JPH065867(A)
申请公布日期
1994.01.14
申请号
JP19920160632
申请日期
1992.06.19
申请人
HITACHI LTD
发明人
IIJIMA TETSUO
分类号
H01L21/336;H01L29/08;H01L29/78;(IPC1-7):H01L29/784
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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