| 摘要 |
PURPOSE:To recover processing damage remaining at a guiding path and to form the path having a low loss by processing a special replaceable type garnet in a shape of the path, and heat treating it in an atmosphere containing oxygen. CONSTITUTION:A replaceable type YIG(yttrium iron garnet) film is formed on a board 1, and a lower clad layer is provided. Then, a replaceable type YIG film is formed on the layer 2, and a guiding parts 3 are provided. Thereafter, a mask material 4 for protecting a necessary part is formed on the parts 3. Then, the board 1 is irradiated with an ion beam IB to dig the parts 3 of the film of a part not covered with the material 4, thereby processing to become a predetermined shape. Subsequently, it is contained in a vacuum vessel, and damaged positions 6 of the parts 3 and the layer 2 are heat treated. A condition of heat treating at this time includes 400-1300 deg.C in an oxygen atmosphere of 10<4>-10<5>Pa. |
