发明名称 WORK SURFACE TREATMENT SYSTEM AND DEVICE THEREFOR
摘要 <p>PURPOSE:To perform surface treatment with a common carrier holder regardless of the thickness of a work by providing a work cleaning device with a control device for moving a work pressure device. CONSTITUTION:A pair of L-shaped protrusion pieces 31, 32 which are a control device for moving a work pressure device 40 are respectively provided on a pair of the arms Aa of the cleaning tank of a cleaning device. These L-shaped protrusion pieces 31, 32 are bent in a V-shaped so that the interlocking lever of the carrier holder 1A of a pair of arms Aa can be fitted thereinto and are fixed on the lower surface of the formed hook part. A carrier 20 is installed into the carrier holder 1A in an upper and lower two-stage structure with the engagement of locking rollers 61, 62 with holes to be held. Thereby, even when the thickness of a work is changed, the same carrier holder is can be used.</p>
申请公布号 JPH065572(A) 申请公布日期 1994.01.14
申请号 JP19920161572 申请日期 1992.06.22
申请人 SONY CORP 发明人 NISHIYAMA HIROYUKI
分类号 H01L21/304;H01L21/68;H01L21/683;(IPC1-7):H01L21/304 主分类号 H01L21/304
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