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发明名称	VACUUM TREATMENT DEVICE
摘要
申请公布号	JPH065687(A)	申请公布日期	1994.01.14
申请号	JP19920163209	申请日期	1992.06.23
申请人	NEC CORP	发明人	HIRAMATSU SHINICHI
分类号	H01L21/677;H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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