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经营范围
发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH065558(A)
申请公布日期
1994.01.14
申请号
JP19920316260
申请日期
1992.10.31
申请人
SONY CORP
发明人
NAGAYAMA TETSUJI;YANAGIDA TOSHIHARU;KADOMURA SHINGO
分类号
H01L21/302;C23F4/00;H01L21/3065;H01L21/338;H01L29/778;H01L29/812;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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