| 摘要 |
PURPOSE:To constitute an equipment which is apt to become large-sized and expensive by using only the parts of low cost, by controlling mechanical shutters and a mechanical filter by using a special controller, and controlling stepwise the exposure speed by using the self-starting speed of a stepping motor. CONSTITUTION:Two mechanical shutters 13, 14 having shielding films, and an attenuation filter 23 are installed on a transmission path from a light source 21 to an irradiation part. Light exposure is started when the mechanical shutters 13, 14 are opened and, at the same time, a stepping motor is operated at the self-starting speed. When the light exposure process approaches the end point, the filter 23 is closed and, at the same time, the speed is decreased. When the process reaches a destination position, the stepping motor is stooped and, at the same time, the shutters 13, 14 are closed. Thereby a highly precise exposure process is enabled without using a large-scale mechanism and equipment, and a low cost system wherein mechanism is simple and miniaturizing and automating are possible can be realized. |
