| 摘要 |
<p>The invention relates to a device for polymer deposition under vacuum in vapour phase by means of a plasma excited by microwaves, on surfaces (110, 210) of a plurality of elements (100), especially aluminised internal surfaces of vehicle lamp reflectors, comprises a deposition enclosure (10), means for establishing a hard vacuum in the said enclosure, microwave excitation means comprising a microwave generator (20) and means (6) for applying the microwaves in the enclosure by means of at least one window (32) which is leaktight to the gas and transparent with respect to the microwaves, and at least one monomer gas diffuser (40) arranged in the deposition enclosure in proximity to each window. According to the invention, the said microwave application means include at least one waveguide (30) situated outside the enclosure and comprising a microwave inlet aperture, one generally planar wall of which (31), turned towards the said window, includes a plurality of radiating slots. Application to the production of a protective deposition on the inner aluminised surfaces of motor vehicles headlamp reflectors. <IMAGE></p> |
