PUMPING SYSTEM

摘要

A gas line pumping system of a dry etching process includes a vacuum generator having an inlet thereof connected onto a gas supply line connected between a gas bomb and an etch chamber for supplying gas used for etching, and an outlet thereof connected between a vacuum pump and a gas cleaning unit to form a tubed path by means of a pipe, so that, if the gas accumulates for a long time after completing the etching, the accumulated gas is exhausted to prevent corrosion or clogging phenomena within the line caused by liquefaction of the gas.