| 摘要 |
<p>PURPOSE:To obtain a durable thermal flowmeter capable of accurately measuring the flow of coolant liquid with good response. CONSTITUTION:A thermal flowmeter 7 is arranged in a fluid passage and a thin film of 1 to 5 microns in thickness is made of titanium or titanium nitride by a sputtering deposition method, an electroless plating method or a hard metal coat method on the outside of a heat generation resistance sensor 8 and a fluid temperature compensation sensor 9. Therefore, even if metal powder and abrasive grains left in coolant liquid F collide with the heat generation resistance sensor 8 and the like at high speed, the flow of the coolant liquid F can be measured accurately and stably because the body of a sensor part is not damaged.</p> |
