| 摘要 |
PURPOSE:To ensure that a liquid droplet discharger which discharges a desired liquid in the form of liquid droplets becomes a constituent component of a recording device, a microdispenser or a direct image drawing device. CONSTITUTION:A pressure chamber 6 which is hermetically sealed by a metal thin film 6 and has an internally installed thermal resistor 8, is provided near the discharge orifice 1 of a liquid flow path. Then a heat-resistant liquid 9 with a higher boiling point than the activation temperature of a discharger is sealed in the pressure chamber. In addition, liquid droplets are discharged by energizing the thermal resistor 8 in the form of a pulse. The liquid flow path and the discharge orifice consist of a few pieces of photoetched sheet glass and a corrosion-inhibitive metal thin film having a smaller coefficient of linear expansion than the former respectively. These two components are sealed by glass and assembled by anodic bonding. |
