发明名称 Method for making a superconducting field-effect transistor with inverted MISFET structure
摘要 This field-effect transistor comprises a conductive substrate (2) serving as the gate electrode, an insulating barrier layer (3), and a superconducting channel layer (1) on top of the barrier layer (3). The superconductor layer (1) carries a pair of mutually spaced electrodes (4, 5) forming source and drain, respectively. The substrate is provided with an appropriate gate contact (6). The substrate (2) consists of a material belonging to the same crystallographic family as the barrier layer (3). In a preferred embodiment, the substrate (2) is niobium-doped strontium titanate, the barrier layer (3) is undoped strontium titanate, and the superconductor (1) is a thin film of a material having a lattice constant at least approximately similar to the one of the materials of the substrate (2) and barrier (3) layers. A preferred material of this type is YBa2Cu3O7-(delta), where 0 (cent)(delta)<=0.5. While the preferred embodiment of the present invention has been herein described, numerous modifications, changes and improvements will occur to those skilled in the art without departing from the spirit and scope of the present invention.
申请公布号 US5278136(A) 申请公布日期 1994.01.11
申请号 US19910731821 申请日期 1991.07.16
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BEDNORZ, JOHANNES G.;MANNHART, JOCHEN D.;MUELLER, CARL A.
分类号 H01L39/22;B05D5/12;H01B12/00;H01L21/336;H01L39/14;H01L39/24;(IPC1-7):H01L21/336 主分类号 H01L39/22
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