Bonding tool having diamond head and method of manufacturing the same

摘要

PURPOSE:To provide a bonding tool having higher durability by improving the construction of diamond used at the tip. CONSTITUTION:In a bonding tool 10 made of gas phase synthesized diamond for the tip surface 15 for thermocompression bonding, the gas phase synthesized diamond 5b forming the tip surface is provided on the gas phase synthesized diamond 5a containing non-diamond component more than that on the tip surface.