发明名称 |
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摘要 |
PURPOSE:To prevent the deterioration in quality by providing a cylindrical straightening plate for eliminating disturbance of the flows of ultra-fine organic substance particles and gas between an evaporation source and a recovery plate of the ultrafine particles. CONSTITUTION:A cylindrical straightening plate 8 is provided between an evapo ration source 2 and a recovery plate 7. Both a gas flow progressed to an exhaust pipe 6 from an inert gas introducing nozzle 3 and the flow of evaporat ed material progressed to the recovery plate 7 from the evaporation source 2 are straightened by the straightening plate 8. Thereby the evaporated material is undisturbed and reached the recovery plate 7 as a uniform flow. The ultrafine organic substance particles produced in the vicinity of the evaporation source 2 are stuck on a film 10 provided closely to the surface of the recovery plate 7. When the ultrafine particles are produced in a range over a long time, the film 10 is drawn out from a roll 10a by a reel 10b and the fresh film 10 is successively prepared on the surface of the recovery plate 7 and the ultrafine particles are stuck thereon and recovered. |
申请公布号 |
JPH062225(B2) |
申请公布日期 |
1994.01.12 |
申请号 |
JP19880286073 |
申请日期 |
1988.11.12 |
申请人 |
SHINKU YAKIN KK;SUTANREE DENKI KK |
发明人 |
ODA MASAAKI;TOYOTAMA HIDEKI |
分类号 |
B01J19/00;B01D3/34;(IPC1-7):B01J19/00 |
主分类号 |
B01J19/00 |
代理机构 |
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代理人 |
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主权项 |
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