| 摘要 |
PURPOSE:To prevent the occupying of large areas in a semiconductor integrated circuit of oscillation circuits by dividing a self-oscillation circuit into a plurality of chips and forming only one part of the oscillation circuits divided into each one chip. CONSTITUTION:In a semiconductor integrated circuit, the inside of which has a self-oscillation circuit, the self-oscillation circuit is divided into a plurality of chips, and only one part of oscillation is shaped into each one chip. That is, an oscillation circuit 5 for measuring the delay time is constituted by connecting NOT logic operation circuits, which are respectively partitioned into a first chip 7, a second chip 8 and a third chip 9 of three chips and placed, and mutual wirings are shaped onto a wafer, crossing scribing lines 1 by alumi num, and mutually connected electrically by aluminum wirings. The number of chips dividing one oscillation circuit is selected arbitrarily at that time, and the number of the stages of logical operators per one chip is brought to a proper number, thus forming a measurable self-oscillation circuit. Accordingly, the area of the oscillation circuit 5 for measuring delay occupying in one inte grated circuit device can be inhibited to a small value. |
