| 摘要 |
PURPOSE:To perform the element analysis on a sample surface and the surface state analysis with high resolution, high surface sensitivity and low noise by analyzing the energy of an Auger electron. CONSTITUTION:An Auger electron spectral diffracting device is formed of a pulse-like positive electron beam generating device 1, an electron detector 3, and a flight time analyzing device 4. The energy of an Auger electron e<-> released when a pulse-like positive electron beam (e<+>) is emitted to a sample 2 and quenched with the electron in the sample 2 is measured by the flight time analyzing device 4, and the energy spectrum is analyzed, whereby the element analysis on the surface and the bonding state analysis on the surface can be precisely performed. |
