| 发明名称 |
Surface treatment agent for fine surface treatment |
| 摘要 |
A surface treatment agent containing a solution of hydrogen fluoride, ammonium fluoride and water, the solution containing less than 8 weight % of hydrogen fluoride (HF) and less than 15 weight % of ammonium fluoride (NH4F).
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| 申请公布号 |
US5277835(A) |
申请公布日期 |
1994.01.11 |
| 申请号 |
US19930050737 |
申请日期 |
1993.04.21 |
| 申请人 |
HASHIMOTO CHEMICAL INDUSTRIES CO., LTD. |
发明人 |
OHMI, TADAHIRO;MIKI, MASAHIRO;KIKUYAMA, HIROHISA |
| 分类号 |
C09K13/08;H01L21/306;H01L21/3105;(IPC1-7):B05D1/00 |
主分类号 |
C09K13/08 |
| 代理机构 |
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