发明名称 1,2-NAPHTHOQUINONE DIAZIDE SULFONYL ESTER COMPOUNDS WITH LINKING BENZOTRIAZOLE GROUPS
摘要 1,2-Naphthoquinone Diazide Sulfonyl Ester Compounds with Linking Benzotriazole Groups Compounds of the general formula (I) or (II) (I) or (II), in which R is 1,2-naphthoquinone-2-diazide-4- or -5-sulfonyl and X is a straight-chain or branched C1-C12-alkylene group, which is unsubstituted or mono- or disubstituted by OH group or is -CH=CH-, are suitable as the light-sensitive component in photoresist materials. Both positive and negative images can be prepared with light-sensitive mixtures containing these compounds and a binder.
申请公布号 CA1326031(C) 申请公布日期 1994.01.11
申请号 CA19870549303 申请日期 1987.10.15
申请人 BAUER, SIGRID 发明人 BAUER, SIGRID
分类号 G03C1/72;C07D235/20;C07D249/18;G03F7/022 主分类号 G03C1/72
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