发明名称 Improvements relating to conductive base supports for semiconductor devices
摘要 1,136,447. Semi-conductor devices. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. 23 Nov., 1966 [26 Nov., 1965], No. 52384/66. Heading H1K. [Also in Division C7] A conductive base support for a semiconductor device is made by cathode sputtering successive layers of Nb and Ni, e.g. each 0À1 to 1 micron thick, on to a ceramic body, e.g. of alumina 4, heating the coated body, e.g. at 1100‹ to 1200‹ C. for ¢ hour in a non-oxidizing atmosphere, e.g. H 2 or cracked ammonia or vacuum to interdiffuse the Nb and Ni, and then cathode sputtering a layer 6 of Au, e.g. 0À1 to 1 micron thick, on to the interdiffused layer 5. A transistor comprising a Si semi-conductor wafer 1 provided with emitter and collector electrodes 2, 3 may be soldered in air to the base support, which may be produced as a metal pattern using mechanical masking during the sputtering or removing metal from the areas where it is not required by grinding, abrasion or etching.
申请公布号 GB1136447(A) 申请公布日期 1968.12.11
申请号 GB19660052384 申请日期 1966.11.23
申请人 PHILIPS ELECTRONIC AND ASSOCIATED INDUSTRIES LIMITED 发明人
分类号 C03C17/40;C04B41/52;C04B41/89;C23C14/02;H01B1/00;H01L21/00;H01L21/58;H01L21/60;H01L23/498 主分类号 C03C17/40
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