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发明名称
Verfahren zur Herstellung eines Körpers aus Silizium.
摘要
申请公布号
DE59003592(D1)
申请公布日期
1994.01.05
申请号
DE19905003592
申请日期
1990.06.13
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
STEIN, KARL-ULRICH, DR., D-8025 UNTERHACHING, DE
分类号
G02B6/12;G02B6/26;G02B6/42;H01L21/302;(IPC1-7):H01L21/302
主分类号
G02B6/12
代理机构
代理人
主权项
地址
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