发明名称 Sesamol/aldehyde condensation products as sensitivity enhancers for radiation sensitive mixtures
摘要 A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one dimeric or trimeric unit formed by the condensation reaction of an aldehyde with sesamol; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
申请公布号 US5275911(A) 申请公布日期 1994.01.04
申请号 US19930011565 申请日期 1993.02.01
申请人 OCG MICROELECTRONIC MATERIALS, INC. 发明人 TOUKHY, MEDHAT A.
分类号 G03F7/022;(IPC1-7):G03F7/023;G03C1/61;G03F7/09 主分类号 G03F7/022
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