Method and compositions for diffusion patterning

摘要

Method for patterning organic polymer layers comprising the sequential steps: A. Applying to a substrate an unpatterned layer of solid acid labile polymer; B. Applying to the unpatterned layer a patterned second layer comprising a liquid solution of organic acid and volatile solvent; C. Heating the patterned layer to effect removal of the volatile solvent from the layer and diffusion of the organic acid into the underlying areas of the first layer; and D. Washing the layers with aqueous base solution to remove the solubilized acid labile polymer from the patterned areas of the layers.