发明名称 Polycrystalline silicon thin film transistor
摘要 An improved field effect transistor having a source region, a drain region, and channel region in a polycrystalline silicon layer, the improvement being that the polycrystalline silicon layer has approximately equal concentrations of N and P type dopants embodied therein, which serves to restrain movement of P/N junctions.
申请公布号 US5275872(A) 申请公布日期 1994.01.04
申请号 US19910742412 申请日期 1991.08.08
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 CHANG, KUN-ZEN
分类号 H01L21/321;H01L21/336;H01L29/786;(IPC1-7):B32B17/00 主分类号 H01L21/321
代理机构 代理人
主权项
地址