发明名称 Process for producing a magnetic disk having a metal containing hard carbon coating by plasma chemical vapor deposition under a negative self bias
摘要 A magnetic disk comprising a nonmagnetic substrate, a metallic thin film magnetic layer provided on the substrate and a hard carbon protective layer provided on the magnetic layer, the hard carbon protective layer containing at least one metal element of silicon, germanium, tin and lead, or further containing fluorine, formed by bias plasma CVD treatment, has a high attrition resistance, a high peeling resistance and a high crack resistance or further a higher corrosion resistance.
申请公布号 US5275850(A) 申请公布日期 1994.01.04
申请号 US19910755589 申请日期 1991.09.04
申请人 HITACHI, LTD. 发明人 KITOH, MAKOTO;KOKAKU, YUICHI;ITOH, MAKIKO
分类号 C23C16/26;G11B5/72;G11B5/84;(IPC1-7):G11B05/00;C23C16/00 主分类号 C23C16/26
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