发明名称 Uniform velocity double sided finishing machine
摘要 A machine for simultaneously finishing two sides of a workpiece simultaneously, the machine having a base, an upper polishing plate, a lower polishing plate, a carrier holding one or more workpieces between the upper and lower polishing plates, a motor attached to a spindle having a first axis, which is fixedly attached to a spindle cam having a second axis such that when the spindle rotates about the first axis, the second axis of the spindle cam moves in a circular non-rotational manner circumscribing a circle having a radius defining a critical radius. The movement of the circular spindle cam causes the lower polishing plate to move in a circular non-rotational manner. The lower polishing plate is connected to one or more eccentric cams by one or more lower polishing plate linkages. The circular non-rotational movement of the lower polishing plate is transferred to the upper polishing plate by one or more eccentric cams via lower polishing plate linkages, and one or more upper polishing plate linkages.
申请公布号 US5274960(A) 申请公布日期 1994.01.04
申请号 US19900601384 申请日期 1990.10.23
申请人 SPEEDFAM CORPORATION 发明人 KARLSRUD, CHRIS E.
分类号 B24B37/04;(IPC1-7):B24B7/17 主分类号 B24B37/04
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