PERFEZIONAMENTO AL METODO DI CONTROLLO DI VELOCIT{ DI CRESCITA EPITASSIALE IN REATTORI VERTICALI A SUSCETTORE ROTANTE,申请号IT1992MI01598-传众专利搜索

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发明名称	PERFEZIONAMENTO AL METODO DI CONTROLLO DI VELOCIT{ DI CRESCITA EPITASSIALE IN REATTORI VERTICALI A SUSCETTORE ROTANTE
摘要
申请公布号	ITMI921598(A1)	申请公布日期	1994.01.01
申请号	IT1992MI01598	申请日期	1992.06.30
申请人	LPE SPA	发明人	AURINO VASCO;DUPRE MICHEL JEAN;POZZETTI VITTORIO
分类号	H01L	主分类号	H01L
代理机构		代理人
主权项
地址

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