Powder agitator for ion implantation unit - using piezoelectric elements on elastic supports to provide oscillatory movement

摘要

The agitator has a powder container with a ribbed base (13) mounted on a series of elastic supports (15) to which are attached piezoelectric elements (14) inside a conventional high vacuum ion implantation chamber. The piezoelectric elements provide oscillatory and rotary movement of the powder without the use of paddles in the container, leading to uniform distribution and exposure of the powder with minimum positive charge build-up.$ The agitator (11), inside a vacuum chamber (1), has a cylindrical container (13) mounted on several elastic supports (15) sepg. a top plate (16) and a base (12). Piezoelectric elements (14) are attached to each support (15) so that each support is successively expanded and contracted. Varying the time period and the polarity also vary the rotary and oscillatory movement of the container (13). The container (13) is earthed to discharge positive ions.$ USE/ADVANTAGE - For ion implantation or ionised beam deposition units. More uniform and higher yields even with small quantities of powders.