METHOD FOR PRODUCTION THIN FILMS OF ALUMINIUM NITRIDE,申请号SU19864163489-传众专利搜索

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发明名称	METHOD FOR PRODUCTION THIN FILMS OF ALUMINIUM NITRIDE
摘要
申请公布号	RU1415804(C)	申请公布日期	1993.12.30
申请号	SU19864163489	申请日期	1986.12.19
申请人	INSTITUT VYSOKIKH TEMPERATUR AN SSSR	发明人	KIRILLIN A.V.;KOSTANOVSKIJ A.V.;ZHILYAKOV L.A.
分类号	C23C8/24;(IPC1-7):C23C8/24	主分类号	C23C8/24
代理机构		代理人
主权项
地址

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