| 摘要 |
PURPOSE:To obtain a durable force detection device with improved temperature characteristics. CONSTITUTION:A displacement body 10 is housed within a fixed body 20 as a device enclosure and is displaced inside when an external force is applied to a point of application P. The displacement body 10 and the fixed body 20 consist of metals. Fixed electrodes B1, B2, and B4 are formed on the inner surface of the fixed body 20 and capacity elements are formed by the fixed electrodes and the opposing surface of the displacement body 10. A force which is applied to the point P is detected based on the change in electrostatic capacity of the capacity elements. The fixed electrode B1 is formed within the fixed body 20 via intermediate layers I1a and I1b. When the intermediate layer I1a is constituted by 42-alloy, the intermediate layer I1b is constituted by glass epoxy resin, and the fixed body 20 is constituted by aluminum, the thermal coefficient of expansion of the entire intermediate layers I1a and I1b becomes equal to that of the fixe body 20, thus preventing the capacitance of the capacity elements from being affected by temperature. |
