VAPOR DEPOSITION DEVICE,申请号JP19920153106-传众专利搜索

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发明名称	VAPOR DEPOSITION DEVICE
摘要
申请公布号	JPH05345974(A)	申请公布日期	1993.12.27
申请号	JP19920153106	申请日期	1992.06.12
申请人	KUBOTA CORP	发明人	MUTO MASAHIKO
分类号	C23C14/52;C23C16/44;C23C16/52;F27D21/02;(IPC1-7):C23C14/52	主分类号	C23C14/52
代理机构		代理人
主权项
地址

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