发明名称 METHOD OF SETTING CAPILLARY IN WIRE BONDING DEVICE
摘要 PURPOSE:To provide the method of setting the capillary in a wire bonding device which materializes the highly accurate positioning of the capillary. CONSTITUTION:This is a method of setting the capillary in a wire bonding device equipped with a camera 3 for pattern recognition, and comprises a process of making a bruise 2a on the target 2 with the top of a capillary 1 by lowering the this capillary 1 arranged above the target 2, a process of reading the target 2 given a bruise 2a with a camera 3 for pattern recognition and deducing the center P1 of the target 2 and the center P2 of the bruise 2a, based on the image read, and a process of calculating the quantities DELTAX and DELTAY of dislocation between the center P1 of the target 2 and the center P2 of the bruise 2a, and compensating the position of the capillary 1, based on the quantities DELTAX and DELTAY of dislocation being calculated.
申请公布号 JPH05347326(A) 申请公布日期 1993.12.27
申请号 JP19920181818 申请日期 1992.06.15
申请人 SONY CORP 发明人 YAMANAKA AKIMITSU
分类号 G05F1/00;G06T1/00;H01L21/60 主分类号 G05F1/00
代理机构 代理人
主权项
地址