| 摘要 |
PURPOSE:To correctly mount a chip on a board by vacuum-attracting a chip roughly corrected in its positional displacement on a nozzle of a transfer head, and transferring the same upward a laser apparatus, and further detecting the position of a lead and a tip end flat portion with laser light. CONSTITUTION:Position of a chip carried onto a rough correction device B is roughly corrected by a Y table 21 and an X table 24. Then, the chip is sucked in a vacuum with a vacuum suction nozzle 8 of a transfer head 7, and is transferred upward of a laser light apparatus C. A lead L of the chip is irradiated with laser light from a light emission part 5 of the laser light apparatus C and reflected light is received with an optical detection part 6 to detect the position of the lead L. On the basis of the detected position, the laser light is irradiated in the direction of the lead L to detect the position of a flat part La of the tip end of the lead L, which is in turn registered in a memory of a computer. The operation is executed for all leads. Hereby, the chip is accurately mounted on the board. |
