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经营范围
发明名称
CLEANING DEVICE
摘要
申请公布号
JPH05347287(A)
申请公布日期
1993.12.27
申请号
JP19920179467
申请日期
1992.06.13
申请人
SONY CORP
发明人
KANEKO TOMOYUKI
分类号
B08B1/04;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B1/04
代理机构
代理人
主权项
地址
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