PRODUCTION OF QUARTZ WAVEGUIDE TYPE OPTICAL PART

摘要

PURPOSE:To produce a quartz waveguide type optical part using a quartz glass thin film having a large film thickness as a waveguide according to a sol-gel method. CONSTITUTION:The method for producing a quartz waveguide type optical part is to control a temperature in heat-treating a coating layer formed by coating a sol substance which is a precursor of fine glass particles in an oxygen atmosphere to that causing no internal stress in the coating layer in repeating the operation to coat the sol substance and then heat-treat the coating layer in an oxygen atmosphere, thereby laminating a glass thin film on a substrate and producing the quartz waveguide type optical part. The thickness of the coating layer in at least the first coating of the sol is reduced from that of the coating layer thereafter in a site having a stepped part.