| 摘要 |
<p>PURPOSE:To enable measurement before and after a bump electrode is made by dividing an electrode into two below the salient electrode, and providing one with a switch on power source potential side and a control switch, and providing the other with a switch on earth potential side and a control switch. CONSTITUTION:This device is equipped, below a bump electrode 7, with halved electrodes, that is, a first divided electrode 11a and a second divided electrode 11b, and both divided electrodes 11 and 11b are connected by a bump electrode 7. A switch 3 on power source side and a first control switch 9a are connected to the first divided electrode 11a, and a switch on earth potential side and a second control switch 9b are connected to the second divided electrode 11b. Furthermore, the first and second controls switches 9a and 9b are connected to a middle potential line 8. Hereby, the inspection of the electric conductivity becomes possible with noncontact before and after the electrodes 11a and 11b are formed.</p> |
