| 摘要 |
PURPOSE:To actually cut down the exposure time while enhancing the workability and restricting the production cost. CONSTITUTION:The proximity exposure device is provided with a plate holder 1 holding a plate 2, mask holders 3a-3d encircling the plate holder 1 and holding a mask 4 as well as spray nozzles 9-11 spraying nitrogen gas into the space between the mask 4 and the plate 2. The spraying nozzles 9 and 11 out of the nozzles 9-11 are oppositely arranged while the other nozzle 10 is arranged so that the nitrogen gas may be sprayed in the orthogonal direction to the spraying direction of the spraying nozzles 9, 11 while an exhaust port 16 of the nitrogen gas is provided on the opposite position to the spraying nozzle 10 of the mask holder 3d. On the other hand, the nitrogen gas is sprayed in the three directions into the space between the mask 4 and the plate 2 so that the air in the device may be vented from the discharge port 16 to fill up the space between the mask 4 and the plate 2 with the nitrogen gas for thinning the oxygen concentration. |
