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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05347300(A)
申请公布日期
1993.12.27
申请号
JP19920155236
申请日期
1992.06.15
申请人
KAWASAKI STEEL CORP
发明人
SANO CHIKAKO
分类号
H01L21/76;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/76
代理机构
代理人
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