SILICON FILM GROWTH METHOD,申请号JP19930041502-传众专利搜索

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发明名称	SILICON FILM GROWTH METHOD
摘要
申请公布号	JPH05347261(A)	申请公布日期	1993.12.27
申请号	JP19930041502	申请日期	1993.03.02
申请人	FUJITSU LTD	发明人	ISHIKAWA HIDEAKI
分类号	H01L21/205;H01L21/331;H01L29/73;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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