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发明名称
PRODUCTION AND APPARATUS FOR PRODUCING FUNCTIONALLY GRADIENT MATERIAL
摘要
申请公布号
JPH05345977(A)
申请公布日期
1993.12.27
申请号
JP19910262770
申请日期
1991.09.12
申请人
HIRAI TOSHIO;SASAKI MAKOTO;KOBE STEEL LTD
发明人
HIRAI TOSHIO;SASAKI MAKOTO;KITAGAWA KAZUO;NAKAO NOBORU;MORITOKI MASATO;KANDA TAKESHI
分类号
C23C16/44;H01L21/205;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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