PRODUCTION OF DIAMOND FILM

摘要

PURPOSE:To produce a diamond film having excellent film flatness by raising emergence density of diamond nuclei. CONSTITUTION:In a process of emergence of diamond nuclei in the production of a diamond film by passing through the process of emergence of diamond nuclei followed by a diamond film growing process, a carbon source gas is introduced before the temperature of a substrate is raised and the surface temperature of the substrate is abruptly elevated to generate diamond nuclei.