| 摘要 |
<p>PURPOSE:To decrease the variation in resistance value caused by the intrinsic resistance of a lead-out electrode by a method wherein a resistance pattern, containing resistance value adjusting pattern, and a lead-out electrode are formed on an insulated substrate, and the resistance pattern and the lead-out electrode are connected by a plurality of parallel paths. CONSTITUTION:The paths 3 and 4, with which a resistance pattern and a lead- out electrode 2 are connected, are connected to the two opposing parts of the rectangular fetch electrode. The above-mentioned paths 3 and 4 are made of metal resistance foil, they have resistance values R3 and R4 in the form of R3=R4=R. Also, the resistance value between the paths 3 and 4 of the lead-out electrode 2 is ra=rb=r. The lead-out electrode 2 is composed of the conductive material such as a Cu alloy or Ni alloy, and the paths 3 and 4 are composed of the metal resistance foil of Ni-Cr alloy. As a result, (r) is sufficiently small against R, the (rc) generated by the contact position of a probe is small still more, contact resistance can be treated as (R+r)/2, and the variation of resistance value due to the contact positional error of the probe can be decreased.</p> |
