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发明名称
SEMICONDUCTOR PRESSURE SENSOR
摘要
申请公布号
JPH05346361(A)
申请公布日期
1993.12.27
申请号
JP19920179355
申请日期
1992.06.12
申请人
MITSUBISHI ELECTRIC CORP
发明人
ICHIHASHI MOTOMI
分类号
G01L9/04;G01L9/00;H01L29/84;(IPC1-7):G01L9/04
主分类号
G01L9/04
代理机构
代理人
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