| 摘要 |
PURPOSE:To inspect whether the pattern width is uniform or not and to quickly perform this inspection by providing a four points judging means and a polygon judging means. CONSTITUTION:Coordinate value data 4 outputted from a design device 2 is inputted to a pattern form inspecting device 3. A graphic judging part 31 judges whether inputted coordinate value data 4 is a tetragon or not and judges whether this data is a polygon consisting of sides whose number exceeds 4 or not. When coordinate data is judged as a tetragon, a four points judging part 32 judges two pairs of sides facing each other of the tetragon have the same length respectively or not, and error is decided if the gate pattern is not rectangular. When coordinate data is judged as a polygon consisting of sides whose number exceeds 4, a polygon judging part 33 judges whether the distances between pairs of closest sides facing each other are uniform or not, and it is decided as an error if they are not uniform. |
